Exhibit 21.1
KLA Corporation
List of Subsidiaries as of June 30, 2019
 
Name
 
State or Other Jurisdiction of
Incorporation / Organization 
DOMESTIC SUBSIDIARIES
 
 
International Sales & Business, Inc.
 
California
KLA-Tencor China Corporation
 
California
KLA-Tencor International Corporation
 
California
VLSI Standards, Inc.
 
California
ADE International Corporation
 
Delaware
Belize Holdings, LLC
 
Delaware
KLA-Tencor Asia-Pac Distribution Corporation
 
Delaware
KT Venture Group, L.L.C.
 
Delaware
KT Venture Group II, L.L.C.
 
Delaware
Dino Acquisition Technology L.L.C.
 
Delaware
Zeta Instruments, Inc.
 
Delaware
KT Recreation Association, LLC
 
Delaware
Whiskey Holding Sub, LLC
 
Tennessee
Capres, Inc.
 
Delaware
ADE Technologies, Inc.
 
Massachusetts
Microsense, LLC
 
Delaware
Nanomechanics Inc.
 
Tennessee
Filmetrics, Inc.
 
California
Orbotech, Inc.
 
Delaware
Photon Dynamics, Inc.
 
California
Photon Dynamics Solar Corporation
 
Delaware
Orbotech LT Solar, LLC
 
Delaware
SPTS Technologies, Inc.
 
California
Primaxx, Inc.
 
Delaware
Xactix, Inc.
 
Pennsylvania
 
 
 
INTERNATIONAL SUBSIDIARIES
 
 
ICOS Vision Systems Corporation BVBA
 
Belgium
ICOS Vision Systems NV
 
Belgium
Lee Ta Technologies (BVI), Inc.
 
British Virgin Islands
KLA-Tencor Corporation (Cayman) Limited, I
 
Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, III
 
Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, IV
 
Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, V
 
Cayman Islands
ICOS Vision Systems (Shenzhen) Co. Ltd.
 
China
KLA-Tencor International Trading (Shanghai) Co., Ltd.
 
China
KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd.
 
China
Zeta Instruments (Shanghai) Co., Ltd.
 
China
KLA-Tencor France SARL
 
France
KLA-Tencor GmbH
 
Germany
KLA-Tencor MIE GmbH
 
Germany
KLA-Tencor MIE Holdings GmbH & Co. KG
 
Germany
KLA-Tencor MIE Holdings Verwaltungs GmbH
 
Germany






Name
 
State or Other Jurisdiction of
Incorporation / Organization
ICOS Vision Systems Ltd.
 
Hong Kong
KLA-Tencor Software India Private Limited
 
India
KLA-Tencor Ireland Ltd.
 
Ireland
Optical Metrology Patents Limited
 
Ireland
KLA-Tencor Corporation (Israel)
 
Israel
KLA-Tencor Corporation Holding (1987) Ltd.
 
Israel
KLA-Tencor Corporation (1992) Ltd.
 
Israel
KLA-Tencor Integrated Metrology (Israel) (2002) Ltd.
 
Israel
Tiburon-Sub Technologies Ltd.
 
Israel
KLA-Tencor Italy S.R.L.
 
Italy
KLA-Tencor Japan, Ltd.
 
Japan
KLA-Tencor Korea, Inc.
 
Korea
KLA-Tencor MIE Holdings S.à r.l.
 
Luxembourg
KLA-Tencor (Malaysia) Sdn Bhd
 
Malaysia
KLA-Tencor (Singapore) Pte. Ltd.
 
Singapore
KLA-Tencor Singapore Holding Co. Pte. Ltd.
 
Singapore
KLA-Tencor Singapore Holding Co. Pte II Ltd.
 
Singapore
KLA Instruments S.A.
 
Switzerland
KLA-Tencor (Thailand) Limited
 
Thailand
KLA-Tencor Limited
 
United Kingdom
Lakers Holding Company APS
 
Denmark
Capres A/S
 
Denmark
Filmetric Europe Gmbh
 
Germany
Filmetrics Korea Ltd
 
South Korea
Orbotech Ltd
 
Israel
Orbograph Ltd.
 
Israel
Frontline P.C.B. Solutions (1998) Ltd.
 
Israel
Frontline P.C.B. Solutions LP
 
Israel
Orbot Systems Ltd.
 
Israel
Laser Imaging Systems GmbH
 
Germany
New System SRL
 
Italy
Orbotech Deutschland GmbH
 
Germany
Orbotech S.A.
 
Belgium
Orbotech Pacific Ltd.
 
Hong Kong
Orbotech Electronics (Shenzhen) Co., Ltd
 
China
Orbotech Electronics (Suzhou) Co Ltd
 
China
Orbotech Trading (Shanghai) Co., Ltd
 
China
Orbotech Japan Ltd
 
Japan
Orbotech Asia Ltd
 
Hong Kong
Orbotech Singapore Corporation Pte Ltd
 
Singapore
Orbotech Korea Ltd
 
Korea
Orbotech Logistics Ltd
 
Hong Kong
SPTS Technologies GmbH
 
Germany
SPTS Technologies SAS
 
France
SPTS Technologies Limited
 
UK
SPTS Technologies Ltd
 
Taiwan
SPTS Technologies Pte Ltd.
 
Singapore





Name
 
State or Other Jurisdiction of
Incorporation / Organization
SPTS Technologies (Shanghai) Co. Ltd.
 
China
Orbotech Holding UK Ltd.
 
UK
PixCell Medical Technologies Ltd.
 
Israel
SPTS Technologies Group Ltd.
 
UK
SPTS Technologies Holdings Ltd.
 
UK
SPTS Technologies Investment Ltd
 
UK
SPTS Technologies Sapphire Ltd
 
UK
SPTS Technologies UK Ltd
 
UK
SPTS Technologies ET Ltd
 
UK
SPTS Technologies Overseas Holdings Ltd.
 
UK
Orbotech Technology Ventures Ltd.
 
Israel
Orbotech Technology Ventures LP
 
Israel
Orbotech Holding GmbH
 
Germany
Orbot Europe S.A
 
Belgium
Orbotech B.V.
 
Netherlands
Orbotech Caribbean Ltd.
 
British Virgin Islands