| Name | State or Other Jurisdiction of Incorporation / Organization | |||||||
| DOMESTIC SUBSIDIARIES | ||||||||
| Anchor Semiconductor, Inc. | California | |||||||
| Belize Holdings, LLC | Delaware | |||||||
| Dino Acquisition Technology L.L.C. | Delaware | |||||||
| ECI Technology, Inc. | New Jersey | |||||||
| ECI Technology International, Inc. | Delaware | |||||||
| Filmetrics, Inc. | California | |||||||
| Front Edge Technology Inc. | California | |||||||
| International Sales & Business, Inc. | California | |||||||
| KLA Aleris Holding, LLC | Delaware | |||||||
| KLA-Tencor Asia-Pac Distribution Corporation | Delaware | |||||||
| KLA-Tencor China Corporation | California | |||||||
| KLA-Tencor International Corporation | California | |||||||
| KT Recreation Association, LLC | Delaware | |||||||
| KT Venture Group II, L.L.C. | Delaware | |||||||
| KT Venture Group, L.L.C. | Delaware | |||||||
| KT Venture Management, L.L.C. | Delaware | |||||||
| Microsense, LLC | Delaware | |||||||
| Nanomechanics Inc. | Tennessee | |||||||
| Orbotech LT Solar, LLC | Delaware | |||||||
| VLSI Standards, Inc. | California | |||||||
| Whiskey Holding Sub, LLC | Delaware | |||||||
| Zeta Instruments, Inc. | Delaware | |||||||
| INTERNATIONAL SUBSIDIARIES | ||||||||
| Anchor (Shanghai) Semiconductor Inc. | Shanghai | |||||||
| Capres A/S | Denmark | |||||||
| ECI Japan KK | Japan | |||||||
| Frontline P.C.B. Solutions Ltd. | Israel | |||||||
| Hefei Shen’An Semiconductor Technology Co. | Hefei | |||||||
| ICOS Vision Systems (Shenzhen) Co. Ltd. | China | |||||||
| ICOS Vision Systems Corporation BVBA | Belgium | |||||||
| ICOS Vision Systems Ltd. | Hong Kong | |||||||
| ICOS Vision Systems NV | Belgium | |||||||
| InnerSense | Israel | |||||||
| KLA-Tencor (Malaysia) Sdn Bhd | Malaysia | |||||||
| KLA-Tencor (Singapore) Pte. Ltd. | Singapore | |||||||
| KLA-Tencor (Thailand) Limited | Thailand | |||||||
| KLA-Tencor Corporation (1992) Ltd. | Israel | |||||||
| KLA-Tencor Corporation (Cayman) Limited, I | Cayman Islands | |||||||
| KLA-Tencor Corporation (Cayman) Limited, III | Cayman Islands | |||||||
| KLA-Tencor Corporation (Cayman) Limited, IV | Cayman Islands | |||||||
| KLA-Tencor Corporation (Israel) | Israel | |||||||
| KLA-Tencor Corporation Holding (1987) Ltd. | Israel | |||||||
| Name | State or Other Jurisdiction of Incorporation / Organization | |||||||
| KLA-Tencor France SARL | France | |||||||
| KLA-Tencor GmbH | Germany | |||||||
| KLA-Tencor Integrated Metrology (Israel) (2002) Ltd. | Israel | |||||||
| KLA-Tencor International Trading (Shanghai) Co., Ltd. | China | |||||||
| KLA-Tencor Ireland Ltd. | Ireland | |||||||
| KLA-Tencor Italy S.R.L. | Italy | |||||||
| KLA-Tencor Japan, Ltd. | Japan | |||||||
| KLA-Tencor Korea, Inc. | Korea | |||||||
| KLA-Tencor Limited | United Kingdom | |||||||
| KLA-Tencor MIE GmbH | Germany | |||||||
| KLA-Tencor MIE Holdings GmbH & Co. KG | Germany | |||||||
| KLA-Tencor MIE Holdings S.à r.l. | Luxembourg | |||||||
| KLA-Tencor MIE Holdings Verwaltungs GmbH | Germany | |||||||
| KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd. | China | |||||||
| KLA-Tencor Singapore Holding Co. Pte II Ltd. | Singapore | |||||||
| KLA-Tencor Singapore Holding Co. Pte. Ltd. | Singapore | |||||||
| KLA-Tencor Software India Private Limited | India | |||||||
| Lakers Holding Company APS | Denmark | |||||||
| Laser Imaging Systems GmbH | Germany | |||||||
| Lee Ta Technologies (BVI), Inc. | British Virgin Islands | |||||||
| New System SRL | Italy | |||||||
| Ofek Technologies | Israel | |||||||
| Optical Metrology Patents Limited | Ireland | |||||||
| Orbograph Ltd. | Israel | |||||||
| Orbotech Asia Ltd | Hong Kong | |||||||
| Orbotech B.V. | Netherlands | |||||||
| Orbotech Caribbean Ltd. | British Virgin Islands | |||||||
| Orbotech Electronics (Shenzhen) Co., Ltd | China | |||||||
| Orbotech Electronics (Suzhou) Co Ltd | China | |||||||
| Orbotech Holding GmbH | Germany | |||||||
| Orbotech Japan Ltd | Japan | |||||||
| Orbotech Korea Ltd | Korea | |||||||
| Orbotech Logistics Ltd | Hong Kong | |||||||
| Orbotech Ltd | Israel | |||||||
| Orbotech Pacific Ltd. | Hong Kong | |||||||
| Orbotech S.A. | Belgium | |||||||
| Orbotech Singapore Corporation Pte Ltd | Singapore | |||||||
| Orbotech Technology Ventures LP | Israel | |||||||
| Orbotech Technology Ventures Ltd. | Israel | |||||||
| Orbotech Trading (Shanghai) Co., Ltd | China | |||||||
| Qoniac Gmbh | Germany | |||||||
| SPTS Technologies (Shanghai) Co. Ltd. | China | |||||||
| SPTS Technologies Limited | UK | |||||||
| SPTS Technologies Overseas Holdings Ltd. | UK | |||||||
| SPTS Technologies UK Limited | UK | |||||||