Exhibit 21.1

KLA-Tencor Corporation

List of Subsidiaries as of June 30, 2010

 

Name

   State or Other Jurisdiction of
Incorporation

DOMESTIC SUBSIDIARIES

  

Ambios Technology, Inc.

   California

International Sales & Business, Inc.

   California

KLA-Tencor China Corporation

   California

KLA-Tencor International Corporation

   California

VLSI Standards, Inc.

   California

ADE International Corporation

   Delaware

Belize Holdings, LLC

   Delaware

KLA-Tencor Asia-Pac Distribution Corporation

   Delaware

KT Venture Group, L.L.C.

   Delaware

KT Venture Group II, L.L.C.

   Delaware

INTERNATIONAL SUBSIDIARIES

  

ICOS Vision Systems Corporation NV

   Belgium

ICOS Vision Systems NV

   Belgium

Lee Ta Technologies (BVI), Inc.

   British Virgin Islands

KLA-Tencor Corporation (Cayman) Limited, I

   Cayman Islands

KLA-Tencor Corporation (Cayman) Limited, II

   Cayman Islands

KLA-Tencor Corporation (Cayman) Limited, III

   Cayman Islands

KLA-Tencor Corporation (Cayman) Limited, IV

   Cayman Islands

ICOS Vision Systems (Shenzhen) Co. Ltd.

   China

KLA-Tencor International Trading (Shanghai) Co., Ltd.

   China

KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd.

   China

Vistec Semiconductor Systems (Shanghai) Co., Ltd.

   China

KLA-Tencor France SARL

   France

ICOS Vision Systems GmbH

   Germany

KLA-Tencor GmbH

   Germany

KLA-Tencor MIE GmbH

   Germany

KLA-Tencor MIE Holdings GmbH & Co. KG

   Germany

KLA-Tencor MIE Holdings Verwaltungs GmbH

   Germany

KLA-Tencor MIE Jena GmbH

   Germany

ICOS Vision Systems Ltd.

   Hong Kong

KLA-Tencor Software India Private Limited

   India

KLA-Tencor Ireland Ltd.

   Ireland

Optical Metrology Patents Limited

   Ireland

KLA-Tencor Corporation (Israel)

   Israel

KLA-Tencor Corporation Holding (1987) Ltd.

   Israel

KLA-Tencor Corporation (1992) Ltd.

   Israel

KLA-Tencor Integrated Metrology (Israel) (2002) Ltd.

   Israel

KLA-Tencor Italy S.R.L.

   Italy

KLA-Tencor Japan, Ltd.

   Japan

VLSI Standards, K.K.

   Japan

KLA-Tencor Korea, Inc.

   Korea

KLA-Tencor MIE S.à r.l.

   Luxembourg

KLA-Tencor MIE Holdings S.à r.l.

   Luxembourg

KLA-Tencor (Malaysia) Sdn Bhd

   Malaysia

KLA-Tencor (Singapore) Pte. Ltd.

   Singapore

KLA-Tencor Singapore Holding Co. Pte. Ltd.

   Singapore

KLA Instruments S.A.

   Switzerland

ICOS Vision Systems Taiwan Co. Ltd.

   Taiwan

KLA-Tencor Yield Management Software Taiwan Corporation

   Taiwan

KLA-Tencor (Thailand) Limited

   Thailand

KLA-Tencor Limited

   United Kingdom

KLA-Tencor (Service) Limited

   United Kingdom