Quarterly report pursuant to Section 13 or 15(d)

BUSINESS COMBINATIONS (Details)

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BUSINESS COMBINATIONS (Details) - USD ($)
$ in Millions
3 Months Ended
Apr. 24, 2020
Aug. 22, 2019
Sep. 30, 2020
April 2020 acquisition      
Business Acquisition      
Total purchase consideration $ 11.4    
Acquired goodwill $ 2.2    
August 2019 acquisition      
Business Acquisition      
Total purchase consideration   $ 94.0  
Additional consideration (up to)   $ 60.0  
Contingent consideration liability, current     $ 6.3
August 2019 acquisition | Wafer Inspection and Patterning      
Business Acquisition      
Acquired goodwill     54.2
Other Acquisitions      
Business Acquisition      
Contingent consideration liability, non-current     $ 6.7