Quarterly report pursuant to Section 13 or 15(d)

EQUITY, LONG-TERM INCENTIVE COMPENSATION PLANS AND NON-CONTROLLING INTEREST - Non-controlling Interest (Details)

v3.20.2
EQUITY, LONG-TERM INCENTIVE COMPENSATION PLANS AND NON-CONTROLLING INTEREST - Non-controlling Interest (Details)
Sep. 30, 2020
Orbograph  
Noncontrolling Interest [Line Items]  
Non-controlling interest, ownership 94.00%
OLTS  
Noncontrolling Interest [Line Items]  
Non-controlling interest, ownership 97.00%
PixCell  
Noncontrolling Interest [Line Items]  
Non-controlling interest, ownership 52.00%