Quarterly report pursuant to Section 13 or 15(d)

Description of Business and Basis of Presentation - Terminated Merger Agreement (Details)

v3.6.0.2
Description of Business and Basis of Presentation - Terminated Merger Agreement (Details)
Oct. 05, 2016
USD ($)
KLA-Tencor Lam Research Merger  
Business Acquisition [Line Items]  
Termination Fee $ 0