Quarterly report pursuant to Section 13 or 15(d)

Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)

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Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)
$ in Thousands
 3 Months Ended
Sep. 30, 2017
USD ($)
reporting_unit
Jun. 30, 2017
USD ($)
Goodwill    
Number of reporting units | reporting_unit 4  
Goodwill    
Balance as of June 30, 2017 $ 349,526  
Foreign currency and other adjustments 152  
Balance as of September 30, 2017 349,678  
Accumulated impairment loss 277,600 $ 277,600
Wafer Inspection    
Goodwill    
Balance as of June 30, 2017 281,095  
Foreign currency and other adjustments (19)  
Balance as of September 30, 2017 281,076  
Patterning    
Goodwill    
Balance as of June 30, 2017 53,255  
Foreign currency and other adjustments 0  
Balance as of September 30, 2017 53,255  
GSS    
Goodwill    
Balance as of June 30, 2017 2,856  
Foreign currency and other adjustments 34  
Balance as of September 30, 2017 2,890  
Others    
Goodwill    
Balance as of June 30, 2017 12,320  
Foreign currency and other adjustments 137  
Balance as of September 30, 2017 $ 12,457