Quarterly report pursuant to Section 13 or 15(d)

Business Combinations - Fiscal 2020 Acquisitions Additional Information (Details)

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Business Combinations - Fiscal 2020 Acquisitions Additional Information (Details) - USD ($)
3 Months Ended
Aug. 22, 2019
Sep. 30, 2019
Business Acquisition    
Acquired goodwill [1]   $ 54,001,000
Wafer Inspection and Patterning    
Business Acquisition    
Acquired goodwill [1]   54,001,000
Privately-held company    
Business Acquisition    
Total purchase consideration $ 93,900,000  
Additional consideration (up to) 60,000,000.0  
Contingent consideration, non-current $ 9,200,000  
Goodwill deductible for income tax purposes   0
Privately-held company | Wafer Inspection and Patterning    
Business Acquisition    
Acquired goodwill   $ 54,000,000.0
[1] No goodwill was assigned to the Other reporting unit, and accordingly was excluded in the table above.