Quarterly report pursuant to Section 13 or 15(d)

BUSINESS COMBINATIONS (Details)

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BUSINESS COMBINATIONS (Details) - USD ($)
$ in Thousands
6 Months Ended
Sep. 17, 2021
Jul. 01, 2021
Dec. 31, 2021
Jun. 30, 2021
Business Acquisition        
Contingent consideration     $ 23,200  
Goodwill     2,042,794 $ 2,011,172
Acquired goodwill     31,621  
Contingent consideration liability, current     1,100  
Contingent consideration liability, non-current     22,100  
Wafer Inspection and Patterning        
Business Acquisition        
Goodwill     448,482 $ 416,860
Acquired goodwill     31,621  
September 2021 acquisition        
Business Acquisition        
Total purchase consideration $ 460,000      
July 2021 acquisition        
Business Acquisition        
Total purchase consideration   $ 81,700    
Additional consideration (up to)   35,000    
Contingent consideration     $ 13,000  
Identifiable intangible assets   31,700    
Net tangible assets   26,400    
Deferred tax liabilities   8,000    
Goodwill   31,600    
July 2021 acquisition | Wafer Inspection and Patterning        
Business Acquisition        
Acquired goodwill   $ 31,600