Quarterly report pursuant to Section 13 or 15(d)

EQUITY, LONG-TERM INCENTIVE COMPENSATION PLANS AND NON-CONTROLLING INTEREST - Non-Controlling Interest (Details)

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EQUITY, LONG-TERM INCENTIVE COMPENSATION PLANS AND NON-CONTROLLING INTEREST - Non-Controlling Interest (Details)
Jun. 30, 2022
Orbograph  
Noncontrolling Interest [Line Items]  
Non-controlling interest, ownership 94.00%